发明名称 BARIUM-SILICIDE-BASED BULK BODY, FILM, AND METHOD FOR MANUFACTURING SAME
摘要 Provided is a barium-silicide-based bulk polycrystalline body, a barium silicide-based film, and an application for the same. A barium-silicide-based bulk polycrystalline body characterized in that [M]/([Ba]+[Si]+[M]) is 0.01-20 atm% and the oxygen content is 20 atm% or less, where [Ba], [Si], and [M] respectively represent the amount of barium, silicon, and a metal element M (at least one element selected from the group consisting of strontium, calcium, and magnesium).
申请公布号 WO2015129878(A1) 申请公布日期 2015.09.03
申请号 WO2015JP55914 申请日期 2015.02.27
申请人 TOSOH CORPORATION;UNIVERSITY OF TSUKUBA 发明人 MESUDA, MASAMI;KURAMOCHI, HIDETO;SUEMASU, TAKASHI
分类号 C23C14/06;H01L21/363 主分类号 C23C14/06
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