Resist composition, method of forming resist pattern and polymeric compound

摘要

A resist composition including a resin component which generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid, the resin component including a resin component having a structural unit represented by a general formula (a0-0-1) shown below;;in which R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R0-1 represents a single bond or a divalent linking group, each of R2, R3 and R4 independently represents a linear, branched or cyclic alkyl group which may have a non-aromatic substituent, or R3 and R4 may be bonded to each other to form a ring together with the sulfur atom, and X represents a non-aromatic divalent linking group or a single bond.

主权项

1. A resist composition for use with EUV or EB, the composition comprising a resin component (A) which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid,
the resin component (A) comprising a resin component (A1) having a structural unit (a0) having no aromaticity in the cation moiety, wherein the structural unit (a0) is represented by a general formula (a0-0-1) shown below: wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R0-1 represents a single bond or a divalent linking group, each of R2, R3 and R4 independently represents a linear, branched or cyclic alkyl group which may have a non-aromatic substituent, or alternatively R3 and R4 may be bonded to each other to form a ring together with a sulfur atom in the general formula, and X represents a non-aromatic divalent linking group or a single bond, and R2—X—S+(R3)(R4) in the general formula (a0-0-1) is represented by a general formula (I-1), (I-2), (I-3) or (I-4) shown below: wherein, u represents an integer of 1 to 3, R5 represents an alkylene group which may have a non-aromatic substituent, R6 represents an alkyl group which may have a non-aromatic substituent, R7 represents a hydroxyl group, R8 represents an unsubstituted alkyl group, and each of R9a to R9c independently represents a linear or branched alkyl group of 5 to 15 carbon atoms.