发明名称 |
Bump-on-trace (BOT) structures and methods for forming the same |
摘要 |
An integrated circuit structure includes a package component, which includes a dielectric layer and a metal trace over and in contact with the dielectric layer. The dielectric layer includes a first dielectric material and a second dielectric material in the first dielectric material. The first dielectric material is a flowable and curable material. The second dielectric material comprises a functional group selected from the group consisting essentially of (—C—N—), (—C—O—), (—N—C═O), and combinations thereof. |
申请公布号 |
US9082765(B2) |
申请公布日期 |
2015.07.14 |
申请号 |
US201313789852 |
申请日期 |
2013.03.08 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Yu Chen-Hua;Lee Chien-Hsun;Wu Jiun Yi |
分类号 |
H01L23/00;H01L21/00;H01L23/498;H01L21/768;H01L21/48;H01L21/56;H01L23/14 |
主分类号 |
H01L23/00 |
代理机构 |
Slater & Matsil, L.L.P. |
代理人 |
Slater & Matsil, L.L.P. |
主权项 |
1. An integrated circuit structure comprising:
a first package component comprising:
a dielectric layer comprising a first dielectric material and a second dielectric material in the first dielectric material, wherein the first dielectric material is a flowable and curable material, and wherein the second dielectric material comprises a functional group selected from the group consisting essentially of (—C—N—), (—C—O—), (—N—C═O), and combinations thereof; and a metal trace over and in contact with the dielectric layer. |
地址 |
Hsin-Chu TW |