发明名称 Bump-on-trace (BOT) structures and methods for forming the same
摘要 An integrated circuit structure includes a package component, which includes a dielectric layer and a metal trace over and in contact with the dielectric layer. The dielectric layer includes a first dielectric material and a second dielectric material in the first dielectric material. The first dielectric material is a flowable and curable material. The second dielectric material comprises a functional group selected from the group consisting essentially of (—C—N—), (—C—O—), (—N—C═O), and combinations thereof.
申请公布号 US9082765(B2) 申请公布日期 2015.07.14
申请号 US201313789852 申请日期 2013.03.08
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Yu Chen-Hua;Lee Chien-Hsun;Wu Jiun Yi
分类号 H01L23/00;H01L21/00;H01L23/498;H01L21/768;H01L21/48;H01L21/56;H01L23/14 主分类号 H01L23/00
代理机构 Slater & Matsil, L.L.P. 代理人 Slater & Matsil, L.L.P.
主权项 1. An integrated circuit structure comprising: a first package component comprising: a dielectric layer comprising a first dielectric material and a second dielectric material in the first dielectric material, wherein the first dielectric material is a flowable and curable material, and wherein the second dielectric material comprises a functional group selected from the group consisting essentially of (—C—N—), (—C—O—), (—N—C═O), and combinations thereof; and a metal trace over and in contact with the dielectric layer.
地址 Hsin-Chu TW