| 发明名称 |
Testing Apparatus And Method |
| 摘要 |
A test apparatus includes a DUT block, at least one probe and at least one variable-length pusher. The DUT block is used for allowing the DUT to be disposed thereon. The probe is located on the DUT block. The variable-length pusher is located above the probe. The actuator is used for moving the variable-length pusher to push against the DUT to force the DUT to be in electrical contact with the probe. |
| 申请公布号 |
US2015192610(A1) |
申请公布日期 |
2015.07.09 |
| 申请号 |
US201414151057 |
申请日期 |
2014.01.09 |
| 申请人 |
Taiwan Semiconductor Manufacturing CO., LTD. |
发明人 |
Tang Kai-Yi |
| 分类号 |
G01R1/04;G01R1/073 |
主分类号 |
G01R1/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for testing a device under test (DUT), the apparatus comprising:
a DUT block for allowing the DUT to be disposed thereon; at least one probe located on the DUT block; at least one variable-length pusher located above the probe; and an actuator for moving the variable-length pusher to push against the DUT to force the DUT to be in electrical contact with the probe. |
| 地址 |
Hsinchu TW |
