发明名称 校正用光源
摘要 <p>The invention relates to a calibration radiation source comprising the following: a housing (2) having an opening (12), a board (22) held in the housing (2), a semiconductor radiation source (18) mounted on the board (22) for generating a light beam, and an exit opening support element (14) having, in the area of the opening (12), a light exit opening (15) through which the light beam radiates outwards from the housing (2). The exit opening support element (14) is decoupled from the housing (2), and is attached to the board (22) of the semiconductor radiation source (18).</p>
申请公布号 JP5731487(B2) 申请公布日期 2015.06.10
申请号 JP20120512237 申请日期 2010.05.18
申请人 发明人
分类号 G01J3/10;G01J1/02;G01J1/08;G01J3/02;G01J5/00;H01L33/64 主分类号 G01J3/10
代理机构 代理人
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