| 摘要 |
PROBLEM TO BE SOLVED: To continue shape measurement even if a measurement error occurs in which a push-in amount of a prove exceeds an allowable range when the shape measurement is performed by a shape measurement device.SOLUTION: A prove movement part 26 moves a prove 211A along a first measurement route. A route setting part 52 sets the first measurement route. A movement control part 33 controls the prove movement part so that the prove 211A moves along the first measurement route. A position detection part 31 detects a position of the prove 211A. A push-in amount detection part 32 detects the push-in amount of the prove 211A. A measurement result storage part 34 stores a position of the prove and the push-in amount. The push-in amount detection part 23 outputs an error signal when a measurement error is detected. The movement control part 33 stops the movement of the prove 211A according to an error signal so as to be moved to an initial point of the first measurement route, and controls the prove movement part 26 so that the prove 211A moves from an initial point to an end point of the first measurement route with the push-in amount held constant. |
