| 摘要 |
PROBLEM TO BE SOLVED: To reduce variation in relative positional relationship between a charge storage region of each photoelectric conversion element and an isolation region arranged between the charge storage regions in manufacturing of a photoelectric conversion device in which a plurality of photoelectric conversion elements are arranged for one ML (microlens).SOLUTION: A manufacturing method of a photoelectric conversion device in which one microlens is arranged for a plurality of charge storage regions formed on a semiconductor substrate comprises: a first process of forming a first impurity region of a first conductivity type on the semiconductor substrate; and a second process of forming on a part of the first impurity region, a second impurity region of a second conductivity type opposite to the first conductivity type and isolating a plurality of regions from the first impurity region in a manner such that each of the plurality of charge storage regions has the isolated first impurity region. |
