发明名称 Fluid processing systems and methods
摘要 Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
申请公布号 US9038855(B2) 申请公布日期 2015.05.26
申请号 US201013375462 申请日期 2010.06.08
申请人 Advanced Technology Materials, Inc. 发明人 Lurcott Steven M.;Hughes John E. Q.;Wrschka Peter;Baum Thomas H.;Ware Donald D.;Zou Peng
分类号 G01F11/00;B01F15/02;B01F3/08;B67D7/02 主分类号 G01F11/00
代理机构 Christensen Fonder P.A. 代理人 Christensen Fonder P.A.
主权项 1. A method including use of a collapsible liner disposed within an overpack container defining an interstitial space between the liner and container, and a cap operatively coupled with the overpack and defining at least one depressurization port and at least one feed material port in fluid communication with the interior volume of the liner, the at least one depressurization port being in fluid communication with the interstitial space and arranged for depressurization and/or pressurization of the interstitial space, the method comprising: applying subatmospheric pressure to the interstitial space to cause the liner to expand and draw feed material from a feed material source into an interior volume of the liner; and pressurizing the interstitial space to cause the liner to contract and thereby dispense the feed material from the interior volume through the feed material port, wherein the feed material is dispensed from the interior volume and through the feed material port into a collapsible liner disposed within another overpack container.
地址 Billerica MA US