| 摘要 |
<p>PROBLEM TO BE SOLVED: To simply detect a particulate substance, and enable consecutive detection with high accuracy by automatic cleaning.SOLUTION: A first electrode 7 is covered with an insulation plate 9. A surface of the insulation plate 9 faces a space 10 where a gas including a particulate substance flows. On the surface of the insulation plate 9, a second electrode 11 for discharging with the first electrode 7 is arranged. A detection ground electrode 12 is arranged in a position located at a distance H from the second electrode 11, on the surface of the insulation plate 9. A silicon-based adhesive 13 includes an opening 14 for exposing the second electrode 11 and the detection ground electrode 12. A current sensor 21 detects a current flowing in the detection ground electrode 12 by discharging between the first electrode 7 and the second electrode 11. The amount of particles of the particulate substance accumulated on the opening 14 is detected from the current flowing in the detection ground electrode, which is measured by the current sensor 21. The particulate substance accumulated on the opening 14 is oxidized and removed by discharging.</p> |
