METHOD AND DEVICE FOR FORMING PRECISION HOLES IN OPTICALLY TRANSPARENT FILM USING AN ULTRASHORT PULSE OF LASER RADIATION

摘要

Proposed is a device for forming precision holes in optically transparent film using an ultrashort pulse of laser radiation, in which the laser radiation is focused by a lens with a high numerical aperture through a volume of a medium with a refractive index that is greater than 1.5. The device makes it possible to form a hole with a diameter of up to 5 μm in a film having a thickness of up to 100 μm using a single ultrashort pulse of laser radiation.