发明名称 DISSOLVED OXYGEN SENSOR
摘要 Embodiments of a dissolved oxygen sensor are disclosed herein. Embodiments as disclosed herein may include a window of optically transparent material disposed in an opening in a fluid flow path, where a luminophor is attached to the side of the window exposed to the fluid in the flow path. An optical probe may be disposed opposite the window from the fluid flow path on an axis at an angle to the window fluid flow path. The optical probe includes an excitation light source for illumination of the luminophor and a reference light source. An optical reception guide is configured to conduct light from the luminophor to a photodiode adjacent to the end of the optical reception guide distal the window when the luminophor is illuminated by the excitation light source. The optical probe is configured to determine a measure of oxygen concentration of the fluid in the flow path. The optical reception guide and photodiode may be aligned on axis, where the axis may be substantially parallel with the axis on which the optical probe is aligned.
申请公布号 US2015125347(A1) 申请公布日期 2015.05.07
申请号 US201414529504 申请日期 2014.10.31
申请人 Entegris - Jetalon Solutions, Inc. 发明人 Machuca Francisco Javier;Montgomery Kyle William;Chiarello Ronald Phillip
分类号 G01N33/18 主分类号 G01N33/18
代理机构 代理人
主权项 1. A dissolved oxygen sensor, comprising: a window of optically transparent material disposed in an opening in a fluid flow path, wherein a luminophor is attached to a first side of the window exposed to the fluid flow path; an optical probe opposite the window from the fluid flow path and the luminophor, wherein the optical probe includes: an excitation light source configured to illuminate the luminophor;an optical reception guide routed through the probe and having a first end proximate the window, wherein the optical reception guide is configured to conduct light received at the first end in response to illumination of the luminophor by the excitation light source;a photodiode configured to receive light conducted by the optical reception guide wherein the photodiode is adjacent to a second end of the optical reception guide distal the window and aligned on an axis with the optical reception guide; anda printed circuit board (PCB) aligned on the axis with the photodiode and the optical reception guide, wherein the photodiode is coupled to the PCB and the PCB includes electronic components configured to determine a measure of oxygen concentration of a fluid in the fluid flow path based on the light received at the photodiode though optical reception guide.
地址 Pleasant Hill CA US