| 摘要 |
PROBLEM TO BE SOLVED: To provide a carriage for maintenance of a wafer inspection device capable of easily pulling out a test head.SOLUTION: A wafer inspection device 10 comprises a cell tower 12 in which a plurality of cells 11 are arranged at four stages, in which each cell 11 accommodates a test head 15, a carriage 27 for maintenance is arranged outside the cell tower 12, the carriage 27 for maintenance comprises: a carriage base part 29 which is movable by having a plurality of rollers 28; a test head case 31 which accommodates the test head 15; a lift mechanism 30 which is erected from the carriage base part 29 and lifts the test head case 31 up and down; and a horizontal position adjustment stage 35 which is interposed between a lifter 34 of the lift mechanism 30 and the test head case 31, and horizontally moves the test head case 31 to the lifter 34. |
