| 摘要 |
The purpose of the present invention is to effectively remove a reaction product included in a gas group. A trap apparatus includes: a first tube-type member having a space, an upstream opening which is freely detachable from the space and supplies a gas group, a second tube-type member having a downstream opening which discharges the gas group supplied from the upstream opening, a downstream trap member which is arranged in the second tube-type member to close the downstream opening, and an upstream trap member which is arranged between the downstream trap member and the upstream opening of the second tube-type member, and has an concave part formed in a direction of the downstream trap member. |
