SOLUTION REACTION APPARATUS AND SOLUTION REACTION METHOD USING THE SAME

摘要

The present invention relates to a solution reaction apparatus and solution reaction method using the same, and more particularly a solution reaction apparatus and a solution reaction method using the same, wherein a reaction vessel is made by using a sealing member, a reaction vessel forming member, and a substrate serving as the bottom part of the reaction vessel so as to cause one side of a reaction solution only to contact the solution, thereby adjusting the temperature of the substrate differently from the temperature of the solution. The solution reaction apparatus of the present invention can control temperature of the substrate and temperature of the reaction solution separately, thereby it can control the temperature of the solution above the boiling point of the solution, and can react the solution while constantly maintaining the concentration of the solution by the solution circulatory device. Accordingly, it has an effect of freely forming various nanostructures on the substrate.

主权项

1. A solution reaction apparatus, which comprises:
a substrate; a sealing member laminated on one side of the substrate; a reaction vessel forming member being laminated on the sealing member and forming a reaction vessel, which can contain reaction solution for solution reaction, using the substrate as a bottom part; and a reaction solution circulatory part circulating the reaction solution into the reaction vessel, which is formed from the substrate, the sealing member and the reaction vessel forming member.