| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibration piece in which Q-value is increased, and to provide a vibrator and an oscillator which have the vibration piece.SOLUTION: In a vibration piece, a crystal vibration piece 1 comprises a base portion 11 and a pair of vibration arms 12, 13 extending from the base portion 11. In the vibration arms 12, 13, a mechanical resonance frequency f is greater than a thermal relaxation frequency f0. The vibration arms 12, 13 have respective groove portions 18 which are formed on respective principal surfaces 10a, 10b facing each other and along a longitudinal direction of the vibration arms 12, 13. The groove portions 18 includes a bottom portion 18c, a first side surface 18a which is formed along a longitudinal direction of the vibration arms 12, 13 and contacts with the principal surfaces 10a, 10b and the bottom portion 18c, and a second side face 18b which opposes to the first side face 18a disposing the bottom portion 18c in-between and contacts with the principal surfaces 10a, 10b and the bottom portion 18c. The groove portions 18 has an electrode-free region, where excitation electrodes 20, 21 are not provided, provided in a range from at least a part of the first side surface 18a in a side of the bottom portion 18c to a part of the second side surface 18b in a side of the bottom portion 18c.</p> |
