| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device capable of performing alignment without creating distortion in a substrate.SOLUTION: A substrate holding device 1 comprises: a suction stage 2 that sucks a part of belt-like substrate W having flexibility; a substrate support part 3 which is arranged in a longitudinal direction of the substrate W such that a part of the substrate W is positioned on the suction stage 2 and supports the substrate W; and an alignment mechanism 4 that aligns the substrate W on the suction stage 2 by displacing the suction stage 2 in the state where a part of the substrate W is sucked to the suction stage 2, and the substrate holding device has a deflection forming mechanism 5 that deflects the substrate W positioned between an end part of the suction stage 2 and the substrate support part 3 before displacing the suction stage 2 by the alignment mechanism 4. |
