| 摘要 |
<p>A cluster-arrangement type substrate processing system is disclosed. According to the present invention, the cluster-arrangement type substrate processing system comprises a substrate reception unit (1) receiving a substrate (40); multiple arrangement type substrate processing devices (9, 9a, 9b, 9c, 9d) arranged along an arrangement path (P) on one side or both sides of the arrangement path (P); a substrate transferring robot loading and unloading the substrate (40) on and from the arrangement type substrate processing devices (9, 9a, 9b, 9c, 9d) while moving from the substrate reception unit (1) along the arrangement path (P); and a substrate storing unit (10) which is interlocked with the substrate transferring robot (7) to move along the arrangement path (7) and temporarily store the substrate (40).</p> |
