Micromechanical sensor

摘要

A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor due to an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses (5, 7) which move toward one another are connected by at least one bending spring device (6). The bending spring device (6) has a spring bar (9) and a meander (10), provided thereon, having a circle of curvature (K1; K6; K8; K9; K11) whose midpoint (MP1; MP6; MP8; MP9; MP11) and radius of curvature (r1; r6; r8; r9; r11) are inside the meander (10). For reducing stresses that occur, in addition to the radius of curvature (r1; r6; r8; r9; r11) having the inner midpoint (MP1; MP6; MP8; MP9; MP11), the meander (10) has at least one further radius of curvature (r2; r3; r4; r5; r7; r10) having a midpoint (MP2; MP3; MP4; MP5; MP7; MP10) outside the meander (10). The at least one further radius of curvature (r2; r3; r4; r5; r7; r10) is situated between the meander (10) and the spring bar (9).

主权项

1. A gyroscope comprising:
a substrate; a first mass within a plurality of masses located above the substrate, the first mass radially oscillates from a first location on the substrate; and a first bending spring within a plurality of bending springs, the first bending spring coupled to the first mass to cause radial oscillation of the first mass, the first bending spring comprising: a first spring bar coupled to the first mass; a first meander extending essentially at a right angle to the first spring bar, the first meander extending along a first axis in a first direct; and a second meander extending essentially at a right angle to the first spring bar, the second meander extending along the first axis in a second direction.