MANAGEMENT DEVICE, SUBSTRATE PROCESSING SYSTEM, DEVICE INFORMATION UPDATING METHOD, AND RECORDING MEDIUM

摘要

In the present invention, a management device, connected to a substrate processing device that retains device information for processing a substrate, is configured so as to comprise the following: a setting section for setting reference device information, from among the device information, which serves as a reference for the device information; a difference section obtained by extracting the difference between acquired device information acquired from the substrate processing device on the basis of the reference device information set by the setting section and the reference device information; an operation display section for displaying the content of the device information including the reference device information; and a control section for performing control so that, upon receiving from the operation display section a correction indicator of the difference section between the acquired device information and the reference device information, on the basis of the correction indicator, corrected device information is created by correcting the acquired device information, and the corrected device information is transmitted to the substrate management device.