摘要 |
PROBLEM TO BE SOLVED: To compactify a superheated water vapor generator and increase a thermal conduction speed to water and saturated water vapor, and thereby enhance temperature controlling properties and also suppress heat loss. SOLUTION: Two induction heaters, each of which is formed by winding a conduction tube 2 to be a primary coil around a leg core of a closed magnetic circuit core and winding a conductor tube 3 to be a secondary coil on the outer periphery thereof to be short-circuited and which performs induction heating of the conductor tube 3 to be the secondary coil by an AC current flowing in the conductor tube 2 to be the primary coil, are connected to each other. Thereby, saturated water vapor is generated from water by the conductor tube 3 to be the secondary coil of the first induction heater 7 and the superheated water vapor is generated from the saturated water vapor by the conductor tube 2 to be the secondary coil of the second induction heater 8. During generation of the superheated water vapor, water for replenishing water level reduction of the first induction heater 7 is made to flow in a circulation passage comprising a piping 15, the conductor tube 2 to be the primary coil of the first induction heater 7, a conductor tube 2 to be the primary coil of the second induction heater 8, a piping 16 and a water supply pump 9 to perform preheating. COPYRIGHT: (C)2012,JPO&INPIT |