发明名称 Multi-component deposition
摘要 Ion-enhanced physical vapor deposition is augmented by sputtering to deposit multi-component materials. The process may be used to deposit coatings and repair material on Ti alloy turbine engine parts. The physical vapor deposition may be ion-enhanced electron beam physical vapor deposition.
申请公布号 US8864956(B2) 申请公布日期 2014.10.21
申请号 US200912582560 申请日期 2009.10.20
申请人 United Technologies Corporation 发明人 Belousov Igor V.;Kuzmichev Anatoly I.;Biber Vladimir;Memmen Robert L.
分类号 C23C14/00;C23C14/32;C25B9/00;C25B11/00;C25B13/00;C23C16/00;C23C16/50;H01J7/24;H05B31/26;C23C14/16;C23C14/22;B23P6/00;C23C14/54;H01J37/32;F01D5/00;H01J37/34 主分类号 C23C14/00
代理机构 Bachman & LaPointe, P.C. 代理人 Bachman & LaPointe, P.C.
主权项 1. A method for depositing a deposition material on a part comprising: placing the part in a deposition chamber; applying a first electric potential to the part; evaporating by electron beam one or more first components for forming the deposition material; ionizing the evaporated first components, the first electric potential drawing the ionized first components toward the part; and sputtering one or more second components for forming the deposition material, ions of the one or more first components being used to sputter the one or more second components, the sputtered second components being codeposited with the ionized first components, the sputtering comprising applying a sputtering voltage to a sputtering target of the one or more second components comprising one or more refractory elements,wherein: the part is a turbine engine part; the deposition material comprises Ti alloy or nickel-based superalloy or cobalt-based superalloy; the part has lost first material from a site; the deposition material is deposited to the site so as to restore the part; and the sputtering target encircles an ion flowpath from a source of the first components to the part.
地址 Hartford CT US