| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus, system, and/or methods capable of measuring one-dimensional optical path length variations of transparent substrates.SOLUTION: Disclosed is a method for the detection and quantification of defects in transparent substrates, particularly in glass sheets. The method comprises providing a transparent planar substrate having a top surface and a bottom surface. The surface topography of at least a portion of the top surface of the provided transparent planar substrate is measured to obtain a three-dimensional top surface profile having a sub-nanometer level of precision. From the three-dimensional top surface profile measurement, the existence of one or more surface variations in the three-dimensional top surface profile having amplitude greater than a predetermined tolerance can be identified and/or quantified. |
