Power supply apparatus for test apparatus

摘要

A voltage source generates a power supply voltage VOUT stabilized such that it matches the voltage level that corresponds to a reference voltage VREF, and supplies the power supply voltage to a DUT. A current detection circuit generates a detection voltage Vm that corresponds to an output current IOUT that flows through the DUT. In the initial state, the reference voltage VREF generated by a reference voltage generating circuit is set to an initial voltage level that corresponds to an input voltage VIN. After the output current IOUT flows, the reference voltage transits to a first voltage level VL1 obtained by shifting the initial voltage level by a first voltage step that corresponds to the detection voltage Vm. Subsequently, the reference voltage VREF transits to a second voltage level VL2 obtained by shifting the initial voltage level by a second voltage step that corresponds to the detection voltage Vm.

主权项

1. A power supply apparatus for a test apparatus, configured to supply a power supply voltage to a device under test, the power supply apparatus comprising:
a voltage source configured to generate the power supply voltage stabilized such that its voltage level matches a voltage level that corresponds to a reference voltage, and to supply the power supply voltage thus generated to the device under test; a current detection circuit configured to generate a detection voltage that corresponds to an output current that flows through the device under test; and a reference voltage generating circuit configured to generate the reference voltage according to an input voltage and the detection voltage, wherein the voltage source comprises:
an operational amplifier configured to receive a feedback voltage corresponding to the power supply voltage and the reference voltage; anda buffer configured to receive an output voltage of the operational amplifier and to output the power supply voltage, wherein the reference voltage generating circuit is configured to generate the reference voltage such that, in an initial state, the reference voltage is set to an initial voltage level that corresponds to the input voltage, and such that, after the output current flows, the reference voltage transits to a first voltage level obtained by shifting the initial voltage level by a first voltage step that corresponds to the detection voltage, following which the reference voltage transits to a second voltage level obtained by shifting the initial voltage level by a second voltage step that corresponds to the detection voltage.