| 摘要 |
A plasma chamber (11′) for coating a substrate with a polymer layer, the plasma chamber comprises a first electrode set (14′) and a second electrode set (14′), the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets comprise plural electrode layers (141′, 142′) and wherein each electrode set comprises plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate. |
