Scanning Acoustic Microscope with an Inverted Transducer and Bubbler Functionality

摘要

A scanning acoustic microscope includes a transducer mounted in a cup below a particular elevation capable of producing ultrasonic energy and a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup. Ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected. The part is disposed at the particular elevation such that a second surface of the part is not contacted by coupling fluid during testing.

主权项

1. A scanning acoustic microscope, comprising:
a transducer mounted in a cup below a particular elevation capable of producing ultrasonic energy; and a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup; wherein ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected, and wherein the part is disposed at the particular elevation and wherein a second surface of the part is not contacted by coupling fluid during testing.