| 发明名称 | Detection of wafer-edge defects | ||
| 摘要 | Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides. The apparatus includes an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk. An X-ray detector is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode. A motion assembly is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk. A processor is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk. | ||
| 申请公布号 | US8781070(B2) | 申请公布日期 | 2014.07.15 |
| 申请号 | US201213570271 | 申请日期 | 2012.08.09 |
| 申请人 | Jordan Valley Semiconductors Ltd. | 发明人 | Wormington Matthew;Ryan Paul;Wall John Leonard |
| 分类号 | G01N23/20 | 主分类号 | G01N23/20 |
| 代理机构 | D. Kligler I.P. Services Ltd. | 代理人 | D. Kligler I.P. Services Ltd. |
| 主权项 | 1. Apparatus for inspection of a disk, which includes a crystalline material and has first and second sides, the apparatus comprising: an X-ray source, which is configured to direct a beam of X-rays to impinge on an area of the first side of the disk; an X-ray detector, which is positioned to receive and form input images of the X-rays that are diffracted from the area of the first side of the disk in a reflective mode; a motion assembly, which is configured to rotate the disk relative to the X-ray source and detector so that the area scans over a circumferential path in proximity to an edge of the disk; and a processor, which is configured to process the input images formed by the X-ray detector along the circumferential path so as to generate a composite output image indicative of defects along the edge of the disk. | ||
| 地址 | Migdal Haemek IL | ||