| 摘要 |
PROBLEM TO BE SOLVED: To provide raw material powder for an IGZO sputtering target with which cracking is scarcely generated in a sintering step and a high production yield is achieved, and to provide a sintered compact, and the sputtering target.SOLUTION: By increasing a ratio of zinc oxide particles with a particle size of 2 μm or less to 95% or more, cracking control in the sintering step is improved, and incidence of sintering crack is drastically reduced even in sintering of a large target. |
