LASER PROCESSING METHOD AND FINE PARTICLE LAYER FORMING AGENT

摘要

A laser processing method including the steps of covering the back side of a workpiece with fine particles having absorptivity to the wavelength of a laser beam to be applied to the workpiece, thereby forming a fine particle layer on the back side of the workpiece, and next applying the laser beam through the fine particle layer to the back side of the workpiece to thereby perform ablation to the workpiece. The laser beam applied to the workpiece is absorbed by the fine particle layer to thereby suppress the scattering of the energy of the laser beam and the reflection of the laser beam, so that the ablation to the workpiece can be efficiently performed.

主权项

1. A laser processing method of applying a laser beam to a workpiece to thereby perform ablation, said laser processing method comprising:
a fine particle layer forming step of covering one side of said workpiece with fine particles having absorptivity to the wavelength of said laser beam to be applied to said workpiece, thereby forming a fine particle layer on the one side of said workpiece; and a processing step of applying said laser beam through said fine particle layer to said workpiece after performing said fine particle layer forming step, thereby performing the ablation to the one side of said workpiece.