发明名称 Layer-selective laser ablation patterning
摘要 The present invention relates to methods of fabricating electronic devices such as thin film transistor (TFT) structures using laser ablation for selective patterning. A method of fabricating an organic electronic device on a substrate (1), said organic electronic device having a structure including an upper conductive layer (5) and an underlying layer (4) immediately beneath said upper conducting layer and with at least one solution processable semiconducting layer (3), the method comprising patterning said upper conductive layer of said structure by laser ablation, and wherein said laser ablating comprises repeatedly removing portions of said layer of material at substantially the same spatial position to expose said underlying layer using repeated laser pulses, each said pulse having a duration of less than 1ns.
申请公布号 EP2463928(A3) 申请公布日期 2014.06.25
申请号 EP20120157149 申请日期 2006.05.30
申请人 PLASTIC LOGIC LIMITED 发明人 HAYTON, CARL;CAIN, PAUL;BROWN, THOMAS MEREDITH
分类号 H01L51/05;H01L51/40 主分类号 H01L51/05
代理机构 代理人
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