DEVICE FOR CELL COUNTING AND METHOD FOR MANUFACTURING THE SAME

摘要

A cell counting device and a manufacturing method thereof are provided. The cell counting device comprises: a semiconductor substrate which includes multiple trenches; a reference dielectric layer which is placed along the circumference of the trench; a detecting electrode which is placed on the reference dielectric layer in order to bury the trench; a sensing dielectric layer which is placed on the front side of the semiconductor substrate; a probe which is fixated to the sensing dielectric layer; and a cell sap chamber which is placed on the sensing dielectric layer fixated with the probe. In addition, the manufacturing method of a cell counting device comprises as follows: a step of forming multiple trenches on a semiconductor substrate; a step of forming a reference dielectric layer along the circumference of the trench; a step of forming a detecting electrode for burying the inside of the trench; a step of forming a sensing dielectric layer on the front side of the semiconductor substrate; a step of fixating a probe to the sensing dielectric layer; and a step of forming a cell sap chamber on the sensing dielectric layer. The manufacturing method of a cell counting device can provide a simple and easily process of forming a burying electrode and can reduce the manufacturing costs.