发明名称 Mask supplying system
摘要 Disclosed is a mask supplying system. The mask supplying system according to one embodiment of the present invention includes: a driving rail which includes a linear rail part and a curved rail part and is supported by a rail hanger on the upper side of an evaporator port formed in a clean room; a mask supplying shuttle which includes a driving unit which is combined with the driving rail to drive and a mask handling unit which handles a mask to supply the mask to the evaporator port; and a unit guide module which is arranged in a branch section where the linear rail part and the curved rail part are branched and guides the driving unit of the mask supplying shuttle.
申请公布号 KR101396223(B1) 申请公布日期 2014.05.19
申请号 KR20120090113 申请日期 2012.08.17
申请人 发明人
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
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