FUNCTIONAL MEMBRANE, MEMBRANE DEPOSITION APPARATUS, AND MEMBRANE DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a functional membrane which has an excellent antireflection effect and a high adhesion to a substrate.SOLUTION: When fluorine-based monomer is supplied toward a surface to be processed of substrate W to deposit a membrane on the surface to be processed in an evacuated vacuum chamber 10, the surface to be processed is irradiated with ions generated by ion generation means 15 from the start to the end of vapor evaporation to form chemical activity points on the substrate W and on the membrane surface during deposition for accelerating the polymerization of the fluorine-based monomer and for modifying the surface to be processed, and a membrane is deposited such that a transition layer in which the refractive index of the membrane changes continuously from the side of the substrate W to the surface of the membrane is formed by successively varying voltage applied to generate the ions.