发明名称 SINTERED OXIDE MATERIAL, METHOD FOR MANUFACTURING SAME, SPUTTERING TARGET, OXIDE TRANSPARENT ELECTRICALLY CONDUCTIVE FILM, METHOD FOR MANUFACTURING SAME, AND SOLAR CELL
摘要 The invention provides an oxide sintered compact 2 composed of a crystal phase which consists of a bixbite-type oxide phase and a perovskite-type oxide phase, or a bixbite-type oxide phase, the crystal phase having indium, tin, strontium and oxygen as the constituent elements, and the indium, the tin and the strontium contents satisfying formulas (1) and (2) in terms of atomic ratio, as well as a sputtering target. There are further provided an oxide transparent conductive film formed using the sputtering target, and a solar cell. Sn / In + Sn + Sr = 0.01 - 0.11 Sr / In + Sn + Sr = 0.0005 - 0.004 [In formulas (1) and (2), In, Sn and Sr represent indium, tin and strontium contents (atomic percent), respectively.]
申请公布号 EP2623478(A4) 申请公布日期 2014.03.26
申请号 EP20110829123 申请日期 2011.09.27
申请人 TOSOH CORPORATION 发明人 KURAMOCHI HIDETO;MATSUMARU KEITARO;AKIIKE RYO;UTSUMI KENTARO;SHIBUTAMI TETSUO
分类号 C04B35/00;C23C14/34;H01B1/08;H01B5/14;H01B13/00 主分类号 C04B35/00
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