APPARATUS FOR CLEANING GLASS SUBSTRATE AND METHOD FOR CLEANING GLASS SUBSTRATE

摘要

An apparatus for cleaning a glass substrate which has a liquid injecting means (5) for injecting a cleaning liquid (7) onto a polished end surface (3a) of a glass substrate (3) with such an injection pressure as to be necessary to scrape out a foreign matter present in fine concave regions of the end surface (3a) and not to damage the glass substrate (3). It is preferred that the liquid injecting means (5) injects the cleaning liquid (7) directly onto the whole area of the polished end surface (3a) of the glass substrate (3) with an injection pressure of 9.8 to 24.5 MPa.