发明名称 STRIPPER COMPOSITION FOR REMOVING DRY ETCHING RESIDUE AND STRIPPING METHOD
摘要 The present invention provides a stripper composition and a stripping method using the same, for stripping a resist film on the substrate for a semiconductor or FPD. More specifically, present invention provides a stripper composition and a stripping method using the same, for stripping photoresist film remaining after forming a pattern, and the polymeric etching residue modified after dry etching.
申请公布号 KR101366957(B1) 申请公布日期 2014.02.25
申请号 KR20060102252 申请日期 2006.10.20
申请人 发明人
分类号 G03F7/42 主分类号 G03F7/42
代理机构 代理人
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