发明名称 SYSTEMS AND METHODS FOR LASER SPLITTING AND DEVICE LAYER TRANSFER
摘要 Methods and systems are provided for the split and separation of a layer of desired thickness of crystalline semiconductor material containing optical, photovoltaic, electronic, micro-electro-mechanical system (MEMS), or optoelectronic devices, from a thicker donor wafer using laser irradiation.
申请公布号 US2014038392(A1) 申请公布日期 2014.02.06
申请号 US201313778047 申请日期 2013.02.26
申请人 SOLEXEL, INC. 发明人 YONEHARA TAKAO;RANA VIRENDA V.;SEUTTER SEAN;MOSLEHI MEHRDAD M.;TAMILMANI SUBRAMANIAN
分类号 H01L21/304 主分类号 H01L21/304
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