| 摘要 |
PROBLEM TO BE SOLVED: To hold a valve body in a state of pressing it to a substrate carrying in/out port without requiring actuation force of an actuator.SOLUTION: A gate valve 200 is constituted to open/close a substrate carrying in/out port 112 by advancing/retreating a valve body 210 by a cam mechanism 260. The cam mechanism includes: a long member 261 slidable in a direction orthogonal to the advancing/retreating direction of the valve body for instance; support rollers 290 for supporting the long member from a back plate of a casing; valve body driving rollers 280 provided to the valve body 210 so as to face the support rollers 290; and plate cams 270 provided to the valve body driving roller side of the long member. The long member is slid in one direction and the valve driving rollers 280 are advanced in a direction of closing the valve body, and on a position where the substrate carrying in/out port is closed while being pressed, force pushed back from the substrate carrying in/out port side is received by the long member to hold the valve body on the closing position. |
