摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser which can be manufactured with high yield in a simple method in a surface emitting laser having laser beams with a polarization direction stabilized in a single direction.SOLUTION: A surface emitting laser has a laminate including a lower semiconductor DBR formed on a substrate by lamination, a lower spacer layer, an active layer, an upper spacer layer and an upper semiconductor DBR. The laminate includes a mesa formed by forming a groove on the laminate around the mesa. A depth of the groove in the laminate in one direction is formed deeper then a depth of the groove in the other direction orthogonal to the one direction. |