| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter in which a gap can be adjusted with high accuracy and the gap can be greatly varied, and an optical filter device, an optical module, and electronic equipment.SOLUTION: A wavelength variable interference filter 5 includes: a first substrate 51 on which a first reflection film 54 is disposed; a second substrate 52 on which a second reflection film 55 is disposed; and an electrostatic actuator 56 composed of a first electrode 561 disposed on the first substrate, a second electrode 562 disposed on the second substrate and opposing to the first electrode via a predetermined gap, and a dielectric film 57 disposed on a part of at least one surface of the first electrode and the second electrode. In an actuator region where the first electrode and the second electrode overlap each other, a first region where the dielectric film is disposed is disposed farther from an optical interference region Arin the actuator region, in a plan view. |
