发明名称 |
INERTIAL SENSOR WITH A LINEAR ARRAY OF SENSOR ELEMENTS |
摘要 |
<p>An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to move in anti-phase to one another along parallel axes but are substantially prevented from moving in phase with one another.</p> |
申请公布号 |
EP1735591(B1) |
申请公布日期 |
2014.01.22 |
申请号 |
EP20050738720 |
申请日期 |
2005.04.14 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
GEEN, JOHN, A. |
分类号 |
G01C19/5719;G01C19/02;G01C19/56;G01C19/574;G01P15/00 |
主分类号 |
G01C19/5719 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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