发明名称 INERTIAL SENSOR WITH A LINEAR ARRAY OF SENSOR ELEMENTS
摘要 <p>An inertial sensor includes at least one pair of sensor elements arranged in a linear array. Each sensor element has a frame and a movable mass suspended within the frame. The frames of each pair of sensor elements may be coupled so that the frames are allowed to move in anti-phase to one another along parallel axes but are substantially prevented from moving in phase with one another.</p>
申请公布号 EP1735591(B1) 申请公布日期 2014.01.22
申请号 EP20050738720 申请日期 2005.04.14
申请人 ANALOG DEVICES, INC. 发明人 GEEN, JOHN, A.
分类号 G01C19/5719;G01C19/02;G01C19/56;G01C19/574;G01P15/00 主分类号 G01C19/5719
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