| 摘要 |
PROBLEM TO BE SOLVED: To roughen the surface of titanium or stainless steel only by sand blasting so as to improve the adhesiveness by lowering the blast pressure, so that the surface of a subject part is subjected to blasting with solid abrasives with a large grain size with a large flow of air. SOLUTION: In the case of working the surface of a part in a chamber of a manufacturing device for a semiconductor or LCD, sand blasting is conducted at pressure lower than usual. At this time, in the case where the raw material 1 is titanium, stainless steel, aluminium or the like, with the final target of surface roughness ranging from approx. Rmax 75μto 120μ, the blast pressure is set lower to approx. 1.5 kg of 0.5 kg, and blasting coating is conducted by using abrasives which is solid abrasives formed of silica carbide and has a large grain size of about #11. As a result, the surface roughness which is near the target value can be obtained, and as the sand blasting surface finishing 10, the projecting and recessed parts are very close as compared with those of an ordinary one, so that the adhesion effect can be improved remarkably.
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