发明名称
摘要 A semiconductor crystal body processing method includes providing a semiconductor crystal body, sandwiching the semiconductor crystal body between a pair of conductive pressurizing tools, applying a pulse-like current between the pair of pressurizing tools to heat the semiconductor crystal body to a target temperature equal to or higher than a temperature at which the semiconductor crystal body is plastically deformed by pressurization and lower than its melting point, and applying pressure and a pulse-like current between the pair of pressurizing tools to thereby maintain the temperature of the semiconductor crystal body at the target temperature and mold the semiconductor crystal body into a target shape by plastic deformation.
申请公布号 JP5382382(B2) 申请公布日期 2014.01.08
申请号 JP20110550888 申请日期 2011.01.14
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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