发明名称 |
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS |
摘要 |
<p>An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.</p> |
申请公布号 |
EP2652485(A1) |
申请公布日期 |
2013.10.23 |
申请号 |
EP20110848482 |
申请日期 |
2011.02.16 |
申请人 |
HERMES-MICROVISION, INC. |
发明人 |
CHEN, ZHONGWEI;REN, WEIMING;KANAI, KENICHI;LIU, XUEDONG |
分类号 |
G21K1/08;H01J37/141;H01J37/28 |
主分类号 |
G21K1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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