发明名称 CERAMIC COATED RING AND PROCESS FOR APPLYING CERAMIC COATING
摘要 To manufacture a ceramic coated article, at least one surface of a quartz substrate having a ring shape is roughened to a roughness of approximately 100 micro-inches (muin) to approximately 300 muin. The quartz substrate is then coated with a ceramic coating comprising a yttrium containing oxide. The quartz substrate is then polished.
申请公布号 US2013273313(A1) 申请公布日期 2013.10.17
申请号 US201313745592 申请日期 2013.01.18
申请人 APPLIED MATERIALS, INC. 发明人 SUN JENNIFER Y.;DUAN REN-GUAN;LUBOMIRSKY DMITRY
分类号 C03C17/23;C03C17/00 主分类号 C03C17/23
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