发明名称 |
APPARATUS OF PRODUCING FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus of producing a film, capable of preventing adverse influence on film producing characteristics, resulting from fine particles of coagulated powder.SOLUTION: A porous film is produced by spraying fine particles of powder having particle diameter distribution from a nozzle 14 onto a substrate. An apparatus of producing a film includes a controlling device 40 that controls the particle diameter distribution of the fine particles to be sprayed onto the substrate by selecting specific fine particles out of the fine particles having been ejected from the nozzle. |
申请公布号 |
JP2013181234(A) |
申请公布日期 |
2013.09.12 |
申请号 |
JP20120047124 |
申请日期 |
2012.03.02 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY;SEKISUI CHEM CO LTD |
发明人 |
HIROSE SHINGO;EZUKA YUKITOSHI;AKETO JUN;KUNUGI SHUNSUKE;YOGUCHI SATOSHI;NAKAJIMA SETSUO |
分类号 |
C23C24/04 |
主分类号 |
C23C24/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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