| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive physical quantity sensor and a manufacturing method thereof, which can obtain excellent sealability and excellent sensitivity while reducing a parasitic capacitance.SOLUTION: A capacitive physical quantity sensor 1 comprises: a sensor substrate 11 for detecting a physical quantity; a base substrate 12 bonded to the sensor substrate 11; and an insulating layer 13 for bonding the sensor substrate 11 and the base substrate 12. The sensor substrate 11 includes a movable part 14 which enables a displacement, and a peripheral part 15 which is located around the movable part 14 and which is bonded through the base substrate 12 and the insulating layer 13. The physical quantity can be detected on the basis of a change in capacitance between the movable part 14 and the base substrate 12, and the insulating layer 13 includes a projection 16 projecting in a direction away from the base substrate 12, and the entire projection 16 is covered with the peripheral part 15. |
