COMPOSITIONS FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES

摘要

PROBLEM TO BE SOLVED: To provide compositions and methods for planarizing or polishing a substrate.SOLUTION: The composition contains: an abrasive comprising alumina particles optionally treated with a polymer; an α-hydroxycarboxylic acid; an oxidizing agent that oxidizes at least one metal; polyacrylic acid; optionally, a calcium-containing compound; optionally, a biocide; optionally, a pH adjusting agent; and water. The method uses the composition to chemically-mechanically polish a substrate.