发明名称 SHEET ADHESION DEVICE AND ADHESION METHOD
摘要 <p>A sheet adhesion device (1) includes: a sheet support unit (6,7) that supports an adhesive sheet (MS) positioned to face the adherend (W); a sheet deforming unit (8A,8B) that bends the supported adhesive sheet (MS) toward the adherend (W) to attach the adhesive sheet (MS) on the adherend (W); and a deformation restricting unit (4A) that restricts an adhesive sheet region positioned further outward than the outer periphery of the adherend when the adherend (W) is seen in a planar view from being deformed toward the adherend (W).</p>
申请公布号 EP2631938(A1) 申请公布日期 2013.08.28
申请号 EP20110834110 申请日期 2011.07.28
申请人 LINTEC CORPORATION 发明人 TAKANO TAKESHI
分类号 H01L21/683;C09J5/00;C09J7/02;H01L21/67 主分类号 H01L21/683
代理机构 代理人
主权项
地址