发明名称 |
Vacuum treatment installation and vacuum treatment method |
摘要 |
Vacuum treatment installation or vacuum treatment method for carrying out a plasma method, wherein the treatment is carried out in a vacuum chamber, in which are disposed a device for generating an electric low voltage arc discharge (NVBE) comprised of a cathode and an anode electrically interconnectable with the cathode via an arc generator, and a workpiece carrier electrically interconnectable with a bias generator for receiving and moving workpieces, as well as at least one feed for inert and/or reactive gas. At least a portion of the surface of the anode is therein fabricated of graphite and is operated at high temperature.
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申请公布号 |
US8496793(B2) |
申请公布日期 |
2013.07.30 |
申请号 |
US20080110463 |
申请日期 |
2008.04.28 |
申请人 |
RAMM JUEERGEN;WIDRIG BENO;KASEMANN STEPHAN;PIMENTA MARCELO DORNELLES;MASSLER ORLAW;HANSELMANN BARBARA;OERLIKON TRADING AG, TRUBBACH |
发明人 |
RAMM JUEERGEN;WIDRIG BENO;KASEMANN STEPHAN;PIMENTA MARCELO DORNELLES;MASSLER ORLAW;HANSELMANN BARBARA |
分类号 |
C23C14/32 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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