发明名称 |
APPARATUS FOR CLEANING OF GAS DISTRIBUTION UNIT |
摘要 |
PURPOSE: An apparatus for cleaning a gas supplying unit is provided to reduce maintenance time by using an automated process for maintaining a consistent process. CONSTITUTION: At least one sub case is installed within a main case. A brush removes a foreign substance. A first driving part (280) rotates the sub case. A second driving part (380) rotates the brush. A third driving part (480) drives a main case on a first guide rail.
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申请公布号 |
KR20130076473(A) |
申请公布日期 |
2013.07.08 |
申请号 |
KR20110145073 |
申请日期 |
2011.12.28 |
申请人 |
LIGADP CO., LTD. |
发明人 |
KIM, JONG MIN;HONG, SUNG JAE |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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